Handbook of silicon wafer cleaning technology / [Latin Book]
Reinhardt, Karen.
| Record Identifier: | 20111 |
| Old Record Identifier: | 20764790 |
| Title and statement of responsibility: | Handbook of silicon wafer cleaning technology //Karen Reinhardt. |
| Physical Description: | pages cm |
| number(ISBN): | 9780323510844 |
| Cataloguing Rules ( Descriptiv...: | rda |
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